Carrier Cleaner
Carrier Cleaner is an automatic cleaning machine used for cleaning Compound Wafer Carrier with residue particles on the surface after M/D process.
Application
FOWLP Process：Carrier Cleaner connects behind Debonding Process.
Benefits
Carrier Cleaner can automatically clean Carrier residue at back & front side, and it can inspect residue and flatness, which can reduce manpower and efficiently manage the cleanness and warpage deformation of the carrier.
Specification & Features
- Carrier direction positioning inspection & Fault prevention mechanism
- OCR reader module
- Configurable Carrier Cleaning parameters
- Back & Front side cleaning function
- AOI Appearance Inspection
- AOI Warpage Inspection
- Easy to operate and avoid human error
- Applied for E84 SPEC
- Applied for SECS/GEM SPEC
Added to your inquiry
carrier_clean
Carrier Cleaner